JPS6457634U - - Google Patents
Info
- Publication number
- JPS6457634U JPS6457634U JP14928487U JP14928487U JPS6457634U JP S6457634 U JPS6457634 U JP S6457634U JP 14928487 U JP14928487 U JP 14928487U JP 14928487 U JP14928487 U JP 14928487U JP S6457634 U JPS6457634 U JP S6457634U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- heat treatment
- introduction section
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14928487U JPS6457634U (en]) | 1987-10-01 | 1987-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14928487U JPS6457634U (en]) | 1987-10-01 | 1987-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6457634U true JPS6457634U (en]) | 1989-04-10 |
Family
ID=31421374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14928487U Pending JPS6457634U (en]) | 1987-10-01 | 1987-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6457634U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20200392625A1 (en) * | 2018-03-28 | 2020-12-17 | Kokusai Electric Corporation | Substrate Processing Apparatus, Gas Nozzle and Method of Manufacturing Semiconductor Device |
-
1987
- 1987-10-01 JP JP14928487U patent/JPS6457634U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20200392625A1 (en) * | 2018-03-28 | 2020-12-17 | Kokusai Electric Corporation | Substrate Processing Apparatus, Gas Nozzle and Method of Manufacturing Semiconductor Device |
| US12188124B2 (en) * | 2018-03-28 | 2025-01-07 | Kokusai Electric Corporation | Substrate processing apparatus, gas nozzle and method of manufacturing semiconductor device |
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